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課程名稱 |
高科技廠房設施設計
High-tech Facility Design |
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開課學期 |
104-1 |
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授課對象 |
工學院 土木工程學系 |
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授課教師 |
張陸滿 |
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課號 |
CIE5065 |
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課程識別碼 |
521 U3790 |
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班次 |
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學分 |
3 |
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全/半年 |
半年 |
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必/選修 |
選修 |
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上課時間 |
星期二A,B,C(18:25~21:05) |
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上課地點 |
土研402 |
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備註 |
上課時間:18:30-21:30
限本系所學生(含輔系、雙修生)
總人數上限：60人 |
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Ceiba 課程網頁 |
http://ceiba.ntu.edu.tw/1041CIE5065_ |
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課程簡介影片 |
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核心能力關聯 |
核心能力與課程規劃關聯圖 |
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課程大綱
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課程概述 |
The purpose of this course is to provide basic design knowledge needed for fabrication (Fab) facilities that supplement high-tech manufacturing and R&D. High-Tech includes, not limited to, the advanced technologies applied in the fields of microelectronics, optoelectronics, precision equipment, telecommunication, nanotech, pharmaceutics, biotech, medical devices, animal experiment, and Aerospace. The processes undertaken in high-tech manufacturing plants and R&D labs require cleanrooms with extremely stringent environmental control.
The environmental control includes temperature and humidity level, air/water quality, purity of chemicals and gases, noise and vibration degree, electromagnetic and radio frequency interference, electrostatic discharge, materials out-gassing, safe grounding, assurance of personnel heath, safety and security and prevention of biohazard.
The focus of this course is on designing semiconductor Fabrication plant (Fab)and engineering its associated facilities. Students will gain skills needed to meet ever-changing challenge of delivering an ultra pure clean room and ultra pure utilities. Moreover, this course will strengthen students’ understanding and background in constructing high-tech manufacturing plant and research lab. Many advanced topics will be introduced, such as 450mm/18" fab, 10 nm manufacturing, Green Fab,IoT, 3D FinFET, Intelligent Sensing, AMHL, Facility/Fab Information Modeling...etc
Outstanding full-time students will be recommended to receive summer internship from high-tech companies and get exposure to high-tech facility design and/or construction in summer.
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課程目標 |
The course will enable the students to:
1. Differentiate the typical processes in semiconductor, biotech, medical
devices, and pharmaceutical manufacturing and R&D.
2. Explain the interdisciplinary nature of high tech manufacturing and research
3. Perform architectural design for cleanroom and schematically layout factory.
4. Use the basic theories and principles to design systems for heating, ventilation and air conditioning (HVAC,) water/air treatment, noise and vibration mitigation.
5. Classify cleanrooms in terms of various international standards.
6. Specify the environmental control criteria for cleanroom in terms of temperature and humidity level, air/water quality, purity of chemicals and gases, noise and vibration degree, electromagnetic and radio frequency interference, electrostatic discharge, materials outgassing, and safe grounding.
7. Apply the knowledge in testing and commissioning cleanroom and its associated facilities.
8. Establish contamination control programs for constructing, operating, and maintaining the high-tech facilities.
9. Address the issues in automatically managing the emergency, safety, and security systems.
10. Link to the information sources for further studies in nano/micro fabrication and research.
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課程要求 |
This course is intended to offer to EMBA, MS, & PhD Graduates, and undergraduate Juniors and Seniors. Students in engineering, science, pharmacy, and life sciense will be exposed to fundamental theories and their applications in the design/build/certify of the high tech manufacturing plants and research labs. Academic faculty will teach basic theories and principles. Professional industrial experts will be invited to cover the application of theories and principles in the real world practices. The contents will include lectures, pop quizzes, home works, a semester team project with an oral presentation and a written report, and a final examination. Field trips to visit high-tech plants and research labs, and cleanrooms will be arranged. Moreover, laboratory experiments will be provided to enable students to get hands-on experiences to measure the cleanroom where is the heart of high-tech Manufacturing&R&D.
There will be about 5~8 home works in fall 2014. Homework counts 20% of “Total Grade.” Students will have reading assignments. The homework is to answer the questions derived from the reading assignments, lectures, lab experiments, cleanroom tour, or field trips.
There is one (1) group term project. The group term project tests the student understands of the principal concepts covered in the course within the context of a comprehensive “real-world” problem. The groups will use 3D-Aided FIM (Facility Information Modeling) to design a simplified fab. When each group completes 30%, 60% and 100% design, concurrent engineering will be performed to integrate the overall design through 5D by the groups. The course also provides an opportunity to develop skills for working in a project team context and communication skills. The term project counts 45%% of the final grade. Off-campus students are encouraged to form a group working on job-related topics through internet and/or other means.
A Final Exam is required on January 13,2015. The Final Exam will be comprehensive and counted as 15% of “Total Grade.” Another 10% is for class participation. |
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預期每週課後學習時數 |
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Office Hours |
另約時間 |
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指定閱讀 |
1. Whyte, W., Cleanroom Design, John Wiley, 2nd ed., New York 1999
2. Carlberg, David M., Cleanroom Microbiology, 2nd ed. CRC Press, Boca Raton,
Florida, 2004
( Both textbooks can be accessed and downloaded from NTU Library online system.)
3. Van Zant, Peter, Microchip Fabrication: A Practical Guide to Semiconductor Processing, 5th ed., McGraw-Hill, New York, 2000. Several Chapters will be handed out.
The above books are highly suggested, but, not mandatory requirement.NTU main library has all the above 3 textbooks in digital format. Students can log in the NTU library system to download the assigned reading chapter/s anytime and anyplace. |
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參考書目 |
1. Chang, C.Y., and Sze, S.M., ULSI Technology, McGraw-Hill Company, Inc., International Edition, 1996, New York.
2. Food and Drug Administration, Guideline on Sterile Drug Products Produced by Aseptic Processing, FDA, Information Branch, Rockville, Maryland, USA.
3. International Organization for Standards, ISO Standard 14644-4, part 4: Design, Construction, Start up, Geneva, Switzerland, 1999.
4. International Society of Pharmaceutical Engineering, Pharmaceutical Engineering Guide – A Guide for New Facilities, Volume 3: Sterile Manufacturing Facilities, ISPE, 2000.
5. Lurgi, S., Xu, J., and Zaslavsky, A., Future Trends in Microelectronics, Wiley, N.Y, 1999.
6. Mulhall, D., Our Molecular Future: How Nanotechnology, Robotics, Genetics, and Artificial Intelligence Will Transform Our World, Prometheus Books, Amherst, N.Y., 2002.
7. Nishi, Y., Doering, K., and Wooldridge, T., Handbook of Semiconductor Manufacturing Technology, Marcel Dekker, New York, 2000.
8. Scherge, M., Biological Micro- and Nanotribiology: Nature’s Solutions, Sprinker, New York, 2001.
9. Van Zant, Peter, Microchip Fabrication: A Practical Guide to Semiconductor Processing, 4th ed., McGraw-Hill, New York, 2000.
10. Whyte. W., Cleanroom Technology: Fundamentals of Design, Testing, and Operation Operation, Chichester, New York, 2001.
11. 半導體製造技術，Quirk Serda 著，羅文雄、蔡榮輝 譯 ，滄海（2003）
12. 半導體奈米技術，龍文安 著，五南(2006)
13. 半導體英語，傳田精一 著，陳連春 譯，建興(2003)
14. 高科技廠務，顏登通，全華科技(2008)
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評量方式
(僅供參考) |
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週次 |
日期 |
單元主題 |
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第1週 |
9/15 |
Course Introduction, Nanotechnology Bases and Scaling Down Methods |
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第2週 |
9/22 |
Fundamentals of Integrated Circuit Manufacturing Processes, (3D IC Design, Immersion, EUV, ArF-dry, Imprint, and Double Patterning) |
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第3週 |
9/29 |
High-Tech Facility Overview and Future Challenges |
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第4週 |
10/06 |
5D Design Tool and Term Project Kickoff Meeting
Design of Lab Layout
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第5週 |
10/13 |
Airborne Molecular Contamination, and EMI Mitigation |
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第6週 |
10/20 |
Fundamentals of Vibration, and Earthquake Early Warning |
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第7週 |
10/27 |
Architectural Design and Cleanroom |
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第8週 |
11/03 |
Structure Design and Simulation |
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第9週 |
11/10 |
30% Design Review Meeting |
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第10週 |
11/17 |
No Midterm Exam. But, It has a lecture on Cleanroom and Mechanic System instead |
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第11週 |
11/24 |
Electrical and Instrument Controls Design |
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第12週 |
12/01 |
UPW, Gases and Chemical System Design |
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第13週 |
12/08 |
60% Design Review Meeting and Concurrent Engineering |
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第14週 |
12/15 |
Fire Protection and Safety Design
Facility Management System
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第15週 |
12/22 |
Environmental Impact Assessment
Green and Sustainable Facilities
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第16週 |
12/29 |
No Class, Compensation for 2-day mandatory Field Trip on 11/14, Saturday and 11/15 Sunday |
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第17週 |
1/05 |
Group Term Project Presentation (Final 100% Design Review) |
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